Gas delivery, mixing and distribution
Parker Veriflo Pressure Reducing Regulators
One-page engineering comparison of Parker Veriflo UHP pressure-reducing regulator families. Expand any family for specifications, supply-pressure effect, flow information, applications and official Parker literature.
| Family | Design | Maximum Inlet | Outlet Range | Cv | Supply Pressure Effect | Sub-atmospheric |
|---|---|---|---|---|---|---|
| FR1000 / FRN1000 | Free poppet; FRT tied option | 3,500 psig | 1–150 psig | 0.09 / 0.15 | 0.6 / 1.5 psig per 100 psig | No |
| FR1300 / FRN1300 | High-flow free poppet | 600 psig | 1–150 psig | 1.2 | 5.9 psig per 100 psig | No |
| QRM / QRMHF | Miniature free poppet | 250 or 500 psig | Vacuum to 250 psig | 0.10 / 0.17 | Not stated in current datasheet | QRM models to approximately 5 psia |
| SMQRM / SMQRMHF | Surface-mount miniature free poppet | 250 or 500 psig | Vacuum to 250 psig | 0.10 / 0.17 | Not stated in current datasheet | SMQRM models to approximately 5 psia |
| FR1200 / FRN1200 | High-flow tied diaphragm | 1,700 psig | 1–150 psig | 1.2 | 6.8 psig per 100 psig | No |
| FR1400 / FR1403SA | High-pressure tied diaphragm | 3,000 psig; FR1403SA vacuum to 300 psig | Vacuum to 150 psig | 0.5 | 1.6 psig per 100 psig | FR1403SA to 100 mm Hg |
| 959 / NPR959 | General-purpose tied diaphragm | 3,500 psig at Cv 0.04; 1,250 psig at Cv 0.20 | Vacuum to 150 psig | 0.04 / 0.20 | 0.6 / 1.5 psig per 100 psig | NPR959 negative-pressure range |
| SQ Series | Tied diaphragm; no wetted spring | 250 to 1,000 psig depending on model | Vacuum to 100 psig | 0.054 to 1.5 | Not stated in current datasheet | SQ60SA available |
| SQ2Micro | Miniature tied diaphragm; no wetted spring | 250 psig | Vacuum to 60 psig | 0.06 / 0.15 | Not stated in current datasheet | To approximately 260 torr |
| SMSQ2Micro | Surface-mount miniature tied diaphragm | 250 psig | Vacuum to 60 psig | 0.06 / 0.15 | Not stated in current datasheet | To approximately 260 torr |
Detailed family information
Free Poppet
FR1000 / FRN1000Free poppet; FRT tied option3,500 psig inlet · Cv 0.09 / 0.15
Valve manifold boxes, gas cabinets and point-of-use semiconductor gas delivery.
Maximum inlet3,500 psig
Outlet range1–150 psig
Flow coefficientCv 0.09 / 0.15
Supply pressure effect0.6 / 1.5 psig per 100 psig
Sub-atmospheric capabilityNo
Published flow informationUp to 200 SLPM N₂ for FRN1000; official curves available
Connections1/4 and 3/8 in. face seal, tube stub, FNPT or A-LOK
Materials316L stainless steel; Hastelloy C-22 diaphragm
TDG selection note: Low supply-pressure effect makes this family useful where source pressure changes substantially during cylinder depletion.
FR1300 / FRN1300High-flow free poppet600 psig inlet · Cv 1.2
High-flow point-of-use bulk and specialty gas service.
Maximum inlet600 psig
Outlet range1–150 psig
Flow coefficientCv 1.2
Supply pressure effect5.9 psig per 100 psig
Sub-atmospheric capabilityNo
Published flow informationUp to 1,200 SLPM N₂
Connections1/4 through 3/4 in. face seal, tube stub, FNPT or A-LOK
Materials316L stainless steel; Hastelloy alloy diaphragm
TDG selection note: Higher capacity than FR1000, but with materially greater supply-pressure effect.
QRM / QRMHFMiniature free poppet250 or 500 psig inlet · Cv 0.10 / 0.17
Compact point-of-use regulation, faster purge and close component spacing.
Maximum inlet250 or 500 psig
Outlet rangeVacuum to 250 psig
Flow coefficientCv 0.10 / 0.17
Supply pressure effectNot stated in current datasheet
Sub-atmospheric capabilityQRM models to approximately 5 psia
Published flow informationFamily-specific curves in Parker literature
Connections1/4 in. face seal or tube stub
MaterialsVeriClean 316L stainless steel; Hastelloy C-22 diaphragm
TDG selection note: Parker publishes the flow curves in the family literature; supply-pressure effect is not stated.
SMQRM / SMQRMHFSurface-mount miniature free poppet250 or 500 psig inlet · Cv 0.10 / 0.17
Modular gas sticks and compact surface-mount systems.
Maximum inlet250 or 500 psig
Outlet rangeVacuum to 250 psig
Flow coefficientCv 0.10 / 0.17
Supply pressure effectNot stated in current datasheet
Sub-atmospheric capabilitySMQRM models to approximately 5 psia
Published flow informationFamily-specific curves in Parker literature
ConnectionsSurface-mount C-seal, high-flow C-seal or W-seal
MaterialsVeriClean 316L stainless steel; Hastelloy C-22 diaphragm
TDG selection note: Use when a surface-mount interface is required.
Tied Diaphragm
FR1200 / FRN1200High-flow tied diaphragm1,700 psig inlet · Cv 1.2
Point-of-use bulk and specialty gases where positive shutoff is required.
Maximum inlet1,700 psig
Outlet range1–150 psig
Flow coefficientCv 1.2
Supply pressure effect6.8 psig per 100 psig
Sub-atmospheric capabilityNo
Published flow informationUp to 1,200 SLPM N₂
Connections1/4 through 3/4 in. face seal, tube stub, FNPT or A-LOK
Materials316L stainless steel; Hastelloy C-22 tied diaphragm
TDG selection note: High capacity and tied diaphragm, but the published SPE is comparatively high.
FR1400 / FR1403SAHigh-pressure tied diaphragm3,000 psig; FR1403SA vacuum to 300 psig inlet · Cv 0.5
Cylinder, gas-cabinet and point-of-use bulk or specialty gas service.
Maximum inlet3,000 psig; FR1403SA vacuum to 300 psig
Outlet rangeVacuum to 150 psig
Flow coefficientCv 0.5
Supply pressure effect1.6 psig per 100 psig
Sub-atmospheric capabilityFR1403SA to 100 mm Hg
Published flow informationUp to 800 SLPM N₂; sub-atmospheric curve available
Connections1/4 through 1/2 in. face seal or tube stub
Materials316L stainless steel; Hastelloy tied diaphragm
TDG selection note: Strong general-purpose high-pressure UHP choice when tied-diaphragm construction, useful flow and relatively low SPE are all required.
959 / NPR959General-purpose tied diaphragm3,500 psig at Cv 0.04; 1,250 psig at Cv 0.20 inlet · Cv 0.04 / 0.20
Specialty and corrosive-gas applications requiring tied-diaphragm shutoff.
Maximum inlet3,500 psig at Cv 0.04; 1,250 psig at Cv 0.20
Outlet rangeVacuum to 150 psig
Flow coefficientCv 0.04 / 0.20
Supply pressure effect0.6 / 1.5 psig per 100 psig
Sub-atmospheric capabilityNPR959 negative-pressure range
Published flow informationFamily-specific curves in Parker literature
Connections1/4 in. FNPT
Materials316L stainless steel or Hastelloy C-22 wetted options
TDG selection note: Legacy family with very low SPE in the Cv 0.04 configuration.
Tied Diaphragm & Springless
SQ SeriesTied diaphragm; no wetted spring250 to 1,000 psig depending on model inlet · Cv 0.054 to 1.5
High-purity point-of-use regulation at or near the process tool.
Maximum inlet250 to 1,000 psig depending on model
Outlet rangeVacuum to 100 psig
Flow coefficientCv 0.054 to 1.5
Supply pressure effectNot stated in current datasheet
Sub-atmospheric capabilitySQ60SA available
Published flow informationMultiple model-specific curves in Parker literature
Connections1/4 and 1/2 in. face seal or tube stub depending on model
MaterialsVeriClean 316L stainless steel; Hastelloy C-22 diaphragm
TDG selection note: The family spans a wide flow range. Select from the individual curves rather than Cv alone.
SQ2MicroMiniature tied diaphragm; no wetted spring250 psig inlet · Cv 0.06 / 0.15
Compact point-of-use regulation and rapid response to step changes.
Maximum inlet250 psig
Outlet rangeVacuum to 60 psig
Flow coefficientCv 0.06 / 0.15
Supply pressure effectNot stated in current datasheet
Sub-atmospheric capabilityTo approximately 260 torr
Published flow informationModel-specific curves in Parker literature
Connections1/4 in. face seal or tube stub
MaterialsVeriClean 316L stainless steel; Hastelloy C-22 diaphragm standard
TDG selection note: Useful where footprint and internal cleanliness are more important than maximum flow.
SMSQ2MicroSurface-mount miniature tied diaphragm250 psig inlet · Cv 0.06 / 0.15
Modular surface-mount gas sticks requiring rapid response and minimum footprint.
Maximum inlet250 psig
Outlet rangeVacuum to 60 psig
Flow coefficientCv 0.06 / 0.15
Supply pressure effectNot stated in current datasheet
Sub-atmospheric capabilityTo approximately 260 torr
Published flow informationModel-specific curves in Parker literature
ConnectionsSurface mount; 1-1/8 or 1-1/2 in. interface
MaterialsVeriClean 316L stainless steel; Hastelloy C-22 diaphragm
TDG selection note: Surface-mount counterpart to SQ2Micro.
Important: Parker literature and ordering codes are controlling. “Not stated” means the current linked Parker literature does not publish a supply-pressure-effect value; it does not mean zero. Flow should be selected from the applicable curve at the actual inlet and outlet conditions rather than from Cv alone.