Here at Triangle Design Group, we understand the unique needs of Semiconductor Research and Development fabs. Whereas production facilities require strict standardization of multiple tool sets and delivery systems for optimization of maintenance, development fabs require process flexibility and rapid process changes.
We have worked with some of the leading development fabrication facilities in the nation, in the development of systems which allow for multiple gases or chemicals to be delivered to the tool in quick succession to enable experiments.
Our modular gas and water panels and floor boxes make it easy for fabs to replace a chamber or tool quickly, while retaining the gas delivery sub system components, reducing costs, leadtime and waste.
Contact us to find out how we enable next node R&D.